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UNMTM ePTFE Filter Membrane or Media for Semiconductors Processing
Our products have a broad range of applications for the semiconductor industry, including process gas filtration, trace moisture detection, ultrapure water, and wet etch and cleans.
High Interception & Low Wind Resistance
PF ≥28@5.3cm/s@0.15μm DOP (Take TSI 3160 As The Test Benchmark)
Reliable Filtration Efficiency
The high efficiency air filter made of our material can meet EN 1822-2019, GB/T 13554, ISO 29463, IEST-RP-CCOO1 ,T/CRAA 431 standard
High Chemical Resistance
Acid and alkali resistance. It can be adapted to various production environments, can maximize product performance and quality.
Overview
Pollutants in the environment will reduce the reliability of microelectronics and semiconductors. Therefore, the material for filters with high waterproof, high air permeability and high filtration efficiency is very important for the stability of its production environment.
We provide solutions for a wide range of microelectronics industries. Our membrane created a high-efficiency, hydrophobic filter medium with a filtration accuracy of up to 99.99997%, which can effectively intercept particles, water vapor and harmful gases in the air. It can fully meet the processing and purification requirements of precision electronic products such as semiconductor chips.
Electron Micrograph
The air filters which made by our material can meet EN 1822-2019, GB/T 13554, ISO 29463, IEST-RP-CCOO1, etc.
Product Offerings
Through R&D and extensive field testing, we’ve developed a portfolio of Unm filter media designed to fit many applications. We also offer membrane discs in custom sizes for diverse applications.
UNMTM ePTFE High Efficiency Composite Filter Media
| Code No. | Filter Grade | Structure | Weight | Thickness | Ave Pressure Drop | Ave Filtration Efficiency | Size Range | |
|---|---|---|---|---|---|---|---|---|
| Layers | Base Fabric | g/m2 | mm | Pa@5.3cm/s | %@5.3cm/s | μm | ||
| YKF080317S | U17 | 3 | PET | 80 | 0.4 | 310-390 | ≥99.99992 | 0.1-0.2 |
| YKF080316H | U16 | 3 | PET | 80 | 0.4 | 270-330 | ≥99.9999 | 0.1-0.2 |
| YKF080316S | U16 | 3 | PET | 80 | 0.4 | 240-300 | ≥99.9997 | 0.1-0.2 |
| YKF080315H | H15 | 3 | PET | 80 | 0.4 | 220-275 | ≥99.999 | 0.1-0.2 |
| YKF080315S | H15 | 3 | PET | 80 | 0.4 | 190-245 | ≥99.997 | 0.1-0.2 |
| YKF080314H | H14 | 3 | PET | 80 | 0.4 | 170-220 | ≥99.997 | 0.3-0.5 |
| YKF080314S | H14 | 3 | PET | 80 | 0.4 | 140-190 | ≥99.995 | 0.3-0.5 |
| YKF080313H | H13 | 3 | PET | 80 | 0.4 | 125-170 | ≥99.97 | 0.3-0.5 |
| YKF080313S | H13 | 3 | PET | 80 | 0.4 | 95-140 | ≥99.95 | 0.3-0.5 |
| YKF080312S | E12 | 3 | PET | 80 | 0.4 | 60-100 | ≥99.5 | 0.3-0.5 |
| YKF080311S | E11 | 3 | PET | 80 | 0.4 | 35-70 | ≥95 | 0.3-0.5 |
| YKF080310S | E10 | 3 | PET | 80 | 0.4 | 18-45 | ≥85 | 0.3-0.5 |
| YKF090517S | U17 | 5 | PET | 90 | 0.45 | 310-390 | ≥99.99992 | 0.1-0.2 |
| YKF090516S | U16 | 5 | PET | 90 | 0.45 | 250-310 | ≥99.9997 | 0.1-0.2 |
| YKF090515S | H15 | 5 | PET | 90 | 0.45 | 200-260 | ≥99.997 | 0.1-0.2 |
| YKF090514S | H14 | 5 | PET | 90 | 0.45 | 150-210 | ≥99.995 | 0.3-0.5 |
| YKF090513S | H13 | 5 | PET | 90 | 0.45 | 100-160 | ≥99.95 | 0.3-0.5 |
UNMTM ePTFE High PHC Filter Media
| Code No. | Filter Grade | Structure | PHC | Weight | Thickness | Ave Pressure Drop | Ave Filtration Efficiency | Size Range |
|---|---|---|---|---|---|---|---|---|
| Layers | g/m2 | g/m2 | mm | Pa@5.3cm/s | %@5.3cm/s | μm | ||
| YKF090516P2 | U16 | 5 | ≥15 | 90 | 0.45 | 310-390 | 99.9999 | 0.1-0.2 |
| YKF090516P | U16 | 5 | ≥15 | 90 | 0.45 | 280-360 | 99.9997 | 0.1-0.2 |
| YKF090515P2 | U15 | 5 | ≥15 | 90 | 0.45 | 250-310 | 99.9992 | 0.1-0.2 |
| YKF090515P | U15 | 5 | ≥15 | 90 | 0.45 | 230-290 | 99.997 | 0.1-0.2 |
| YKF090514P2 | H14 | 5 | ≥15 | 90 | 0.45 | 200-260 | 99.997 | 0.3-0.5 |
| YKF090514P | H14 | 5 | ≥15 | 90 | 0.45 | 180-240 | 99.995 | 0.3-0.5 |
| YKF090513P2 | H13 | 5 | ≥15 | 90 | 0.45 | 150-210 | 99.97 | 0.3-0.5 |
| YKF090513P | H13 | 5 | ≥15 | 90 | 0.45 | 130-190 | 99.95 | 0.3-0.5 |
